Growth of sputter-deposited Ti_1-xAl_xN investigated by in-situ x-ray diffraction

Growth of sputter-deposited Ti_1-xAl_xN investigated by in-situ x-ray diffraction

Beckers, M.; Schell, N.; Martins, R. M. S.; Möller, W.

• Vortrag (Konferenzbeitrag)
  Symp. of the Belgium and Dutch Vacuum Society, 09.-10.12.2004, Gent, Belgium

Permalink: https://www.hzdr.de/publications/Publ-9791