Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf

1 Publikation

Application of combined low and high energy ion assistance for film formation and stress relaxation of cBN thin films

Kolitsch, A.; Abendroth, B.; Gago, R.; Fitz, R.; Möller, W.

Abstract

There is no abstract provided.

  • Eingeladener Vortrag (Konferenzbeitrag)
    IV International Symposium “Ion Implantation and Other Application of Ions and Electrons” ION 2004, 14.-17.04.2004, Kazimierz Dolny, Poland

Permalink: https://www.hzdr.de/publications/Publ-9823