Publikationsrepositorium - Helmholtz-Zentrum Dresden-Rossendorf
1 PublikationApplication of combined low and high energy ion assistance for film formation and stress relaxation of cBN thin films
Kolitsch, A.; Abendroth, B.; Gago, R.; Fitz, R.; Möller, W.
Abstract
There is no abstract provided.
-
Eingeladener Vortrag (Konferenzbeitrag)
IV International Symposium Ion Implantation and Other Application of Ions and Electrons ION 2004, 14.-17.04.2004, Kazimierz Dolny, Poland
Permalink: https://www.hzdr.de/publications/Publ-9823