Combined application of multiple ion energies for simultaneous growth and stress relaxation at thin film deposition

Combined application of multiple ion energies for simultaneous growth and stress relaxation at thin film deposition

Kolitsch, A.; Abendroth, B.; Gago, R.; Fitz, R.; Möller, W.

• Eingeladener Vortrag (Konferenzbeitrag)
  ECAART-8 2004, 8th European Conference on Accelerators in Applied Research and Technology, 20.-24.09.2004, Paris, France

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