Detailed profiling of ion implantation induced excess vacancies in silicon
Detailed profiling of ion implantation induced excess vacancies in silicon
Peeva, A.
Abstract
Profiles of excess vacancies in silicon produced by ion implantation are studied by TEM.
Keywords: excess vacancies; Si; ion implantation
-
Sonstiger Vortrag
Arbeitstreffen Punktdefekte TU Dresden, 01.-02.04.2004, Dresden, Deutschland
Permalink: https://www.hzdr.de/publications/Publ-9914